In this study, the silver agglomerates and silver colloids were generated by evaporation/ condensation method and constant output atomizer. The differential mobility analyzer (DMA) was uased to classify the monodisperse particles with mobility diameters of 30, 80, 150, 250 and 300 nm, and then sintered by second furnace from 24 to 800℃. The scanning mobility particle sizer (SMPS), aerosol particle mass analizer (APM), Aerotrak 9000 were used to measure the particulate size distribution, mass, alveolar deposited surface area concentration, respectively. Agglomerates are sampled using the microorifice-based concentrated nanoparticle sampler (CNS) and then analyze by TEM. The results showed that number median diameters (NMDs) of silver agglomerates were significantly reduced for sintering temperature from 100 to 200℃, but showed little variation for sintering temperature above 200℃. And NMDs of silver colloids were significantly changed for sintering temperature above 400℃ due to the surfactants.The silver agglomerates generated by evaporation/condensation method were found to be irregular and composed of several primary particles as observed by the TEM images. However, silver colloids generated by constant output atomizer were covered with the surfactant and presented spherical shape which result in the differences in surface shape factor, dynamic shape factor and particle effective density.